Statics and Dynamics of V-Shaped Microbeams Under Axial Forces

Abstract This work proposes an examination into the static and dynamic behaviors of in-plane V-shaped microbeam under both electric forces axial loads. The microbeams are actuated with two separate electrodes uniform air gap across their length. effects initial rise DC bias voltage examined while varying loads ranging from compressive to tensile. numerical analysis is based on a nonlinear equation motion shallow microbeam. eigenvalue problem were solved using modal expansion reduced-order modeling for numerous equilibrium positions. analytical model validated by comparing experimental case study. results show rich diverse behavior. It shown that may exhibit only pull-in or snap-through instabilities. Various multistate hysterics demonstrated when actuation rise. High tunability first symmetric vibration modes. With various load options different geometrical configurations, this particular shows capacity increasing deflection range before pull-in, allowing more variation its fundamental natural frequency. Therefore, it could be promising realization wide-range tunable microresonator as compared regular straight even bell-shaped microbeams. These very useful in microscale applications can benefit designing some structures low power consumption, high sensitivity, wide tuning range. Such behavior high-performance designs.